颐虹机电|特种气体输送设备|气体输送设备供应商

Gas Scrubber

                Description

- It is possible to operate(bypass function) by itself, even the power shut off or N2 supply is stop. Also, you can go into manual mode and operate it.
- It is not necessary to stop ‘CS195SC’ during Scrubber BM , PM , changing a resin and all process of Main Tool. There is no ‘Downtime’.
- If CS195SC detect over pressure more than 960torr, bypass ball valve is opened automatically and prevent the damage of wafers due to the back pressure. Also, all used gases which flow to the bypass line can be disposed safely through the Mini-absorber.

关键词：气体输送设备、输送设备、气体输送设备厂家

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